Green Line product information:
B20 - hemispherical AFM tip for high precision indentation measurements

• Hemispherical tip shape. Reliable nanomechanical investigations and consistent data modelling.
• Tip shape radius 20 nm ±5 nm. Fabricated with nm precision.
• Force constant available from 0.2 N/m to 40 N/m. Matching a wide range of sample stiffness investigations.
• Outstanding HDC/DLC tip hardness. Repeatable and reliable deformation measurements.

See the NanoIndentation product series

Blue Line product information:
CDR50-EBD – The standard for high-performance mask inspection

• Constant reliability. Rotationally symmetric T-like shape with tight tip parameter specifications for reliable and consistent metrology measurements.
• Enhanced performance. Tilt-compensated to 3°±0.5° combined with an overhang of 10 nm for unmatched degrees of reentrancy.
• Ultra-high resolution. 5 nm tip edge radius for ultra-high resolution sidewall roughness measurements
• Improved throughput. Significantly enhanced material durability compared to state-of-the-art Si CDR tips. For long-lasting tip performance and reduced cost per measurement.

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German Engineering, Manufacturing and Quality Control:
nanotools was the first AFM probe manufacturer to be ISO 9001 certified in 2008.

• Uniform and consistent high quality products and services
• Extreme narrow specifications for AFM tip, cantilever and chip
• Full traceability of all manufacturing parameters for every AFM tip
• 100% quality check for every AFM tip

Download our latest certificate

Conference proceedings update:
Dimensional measurements of CD atomic force microscopy tips

See the first results from our cooperation with POLLEN Technology and CEA LETI on the "Development of a comprehensive metrology software platform dedicated to dimensional measurements of CD atomic force microscopy tips“.

• Conference: SPIE Advanced Lithography 2015, San Jose, California, USA
• Session: Metrology, Inspection, and Process Control for Microlithography XXIX, Session 6 AFM
• Date: Tuesday 24 February 2015, 1:20 PM - 3:00 PM
• Paper: 9424-28, presented by Johann Foucher/POLLEN Technology

Visit the SPIE proceedings page for details (external link)

Blue Line product update:
HDC-20 – supersharp, robust HAR AFM tip for very fine features

• Length 250 nm
• Width at 100nm depth <10 nm
• Tip sharpness <3 nm
• AR >10
• Tilt compensation 3°
• Resonance frequency 320 kHz
• Force constant 40 N/m

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Blue Line feature update:
TrueDimensions – online access to actual tip dimensions

• What you need
  Enter the serial number S/N given on the backside of your probe box in the TrueDimensions field. Click the arrow button.
• What you get
  Get the key probe characteristics for every individual tip. Extracted from NIST-traceable SEM measurements.

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