Publication update:
nanotools spherical AFM tips featured in research article

Learn how precisely shaped full carbon AFM tips with 500 nm radius help to gain reliable information about the mechanical properties of DEA structures

• Title: Stress measurements of planar dielectric elastomer actuators, DOI: 10.1063/1.4949519
• Authors: Bekim Osmani, Elise A. Aeby, and Bert Müller, University of Basel (Switzerland)
• Publication: Review of Scientific Instruments
• Publisher: AIP Publishing LLC
• Date: May 2016

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Used with permission from AIP Publishing LLC
Copyright © 2016 AIP Publishing LLC. All rights reserved.

Publication update:
nanotools CDR-EBD tips featured in research article

Experience how nanotools diamond-like carbon CDR-EBD tips positively impact the long-term measurement stability of CD-AFM measurements

• Title: Measurements of CD and sidewall profile of EUV photomask structures using CD-AFM and tilting-AFM, DOI: 10.1088/0957-0233/25/4/044002
• Authors: Gaoliang Dai, Kai Hahm, Frank Scholze, Mark-Alexander Henn, Hermann Gross, Jens Fluegge and Harald Bosse, Physikalisch Technische Bundesanstalt/PTB (Germany)
• Publication: Measurement Science and Technology
• Publisher: IOP Publishing Ltd
• Date: March 2014

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Used with permission from IOP Publishing Ltd.
Copyright © 2014 IOP Publishing Ltd. All rights reserved. This is an author-created, un-copyedited version of an article accepted for publication/published in Measurement Science and Technology. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at 10.1088/0957-0233/25/4/044002

Publication update:
nanotools M-CNT tips featured in research article

Learn how nanotools M-CNTs are successfully applied to investigate the impact of probe-tip dimensions on resolution and contrast in magnetic force microscopy (MFM)

• Title: Demonstration of ultra-high-resolution MFM images using Co₉₀Fe₁₀-coated CNT probes, DOI: 10.1016/j.jmmm.2009.09.052
• Authors: Sang-Jun Choi, Ki-Hong Kim, Young-Jin Cho, Hu-san Lee, Samsung Electronics Co. Ltd. (Republic of Korea); Soo-haeng Cho, Yonsei University (Republic of Korea); Soon-Ju Kwon, POSTECH (Republic of Korea); Jung-hwan Moon, Kyung-Jin Lee, Korea University (Republic of Korea)
• Publication: Journal of Magnetism and Magnetic Materials
• Publisher: Elsevier B.V.
• Date: February 2010

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Used with permission from Elsevier B.V. (LICENSE #: 3818181196341).
Copyright © 2016 Elsevier B.V. All rights reserved.

Publication update:
nanotools AFM tips featured in research article

Discover a newly developed tip characterization method for CD-AFM by means of a multi-feature characterizer.

• Title: Tip characterization method using multi-feature characterizer for CD-AFM, DOI: 10.1002/9781118723111
• Authors: Ndubuisi G. Orji, NIST (United States), Hiroshi Itoh, Chumei Wang, AIST (Japan), Ronald G. Dixson, NIST (United States), Peter S. Walecki, Florida Atlantic University (United States), Sebastian W. Schmidt, Bernd Irmer, nanotools GmbH (Germany)
• Publication: Ultramicroscopy
• Publisher: Elsevier B.V.
• Date: March 2016

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Used with permission from Elsevier B.V. (LICENSE #: 3818181124835).
Copyright © 2016 Elsevier B.V. All rights reserved.

Conference proceedings update:
B500 applied for the characterization of dielectric elastomer actuators.

Learn how spherical B500 AFM tips contribute to characterize the "Morphology and conductivity of Au electrodes on polydimethylsiloxane using (3-mercaptopropyl)trimethoxysilane (MPTMS) as an adhesion promoter".

• Conference: SPIE Smart Structures NDE 2016, Las Vegas, Nevada, USA
• Session 9B: New EAP Materials, Processes, and Fabrication Techniques III
• Date: Thursday 24 March 2016, 9:20 AM - 12:10 PM
• Paper: 9798-68
• Authors: Bekim Osmani, Hans Deyhle, Florian M. Weiss, Tino Töpper, Maria Karapetkova, Vanessa Leung, Bert Müller, Univ. Basel (Switzerland)

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Copyright © 2016 by SPIE.

Conference proceedings update:
M-CNT-150 for DSA depth measurements.

Learn how nanotools M-CNT-150 AFM tips contribute to characterize the "Influence of template fill in grapho-epitaxy DSA".

• Conference: SPIE Advanced Lithography 2016, San Jose, California, USA
• Session 13: DSA Materials: Fundamentals and Simulation
• Date: Thursday 25 February 2016, 11:30 AM - 11:50 AM
• Paper: 9779-49
• Authors: Jan Doise, KU Leuven (Belgium); Joost P. Bekaert, Boon Teik Chan, IMEC (Belgium); Sung Eun Hong, Guanyang Lin, EMD Performance Materials Corp. (United States); Roel Gronheid, IMEC (Belgium)

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Copyright © 2016 by SPIE.

Green Line product flyer update:
Spherical AFM tips for high performance nanoindentation measurements.

• Ultrahigh resolution. Tip shape radius from 20 nm up to 500 nm fabricated with nm precision.
• Enhanced versatility. Force constants from 40 N/m to 0.2 N/m for challenging measurements ranging from the hardness of ultrathin layers to the stress-strain behavior of biological samples.
• Accurate modelling. Axisymmetric tip geometry for reliable nanomechanical investigations and advanced modelling.
• Outstanding tip hardness. HDC/DLC tip for repeatable and long-lasting deformation measurements.

Download NanoIndentation product flyer

Blue Line product flyer update:
EBD6-400 – high performance substitute for silicon-FIB AFM probes.

• Extreme aspect shape. 6 µm long AFM tip with an aspect ratio >10.
• Precise orientation. Tilt compensated for enhanced accessibility and reliable high-resolution inspection of steep features.
• Excellent stability. Conical shape optimized for accurate measurement performance even on sharpest feature edges.
• Improved throughput. Outstanding tip material durability for enhanced tip lifetime and reduced cost per measurement.

Download EBD6-400 product flyer

Blue Line product flyer update:
CDR50-EBD – The industry standard for high-performance mask inspection and wafer process monitoring.

• Proven reliability. Rotationally symmetric T-like shape with tight tip parameter specifications for reliable and consistent metrology measurements.
• Enhanced performance. Tilt-compensated to 3°±0.5° combined with an overhang of 10 nm for unmatched degrees of reentrancy.
• Ultra-high resolution. 5 nm tip edge radius for ultra-high resolution sidewall roughness measurements.
• Improved throughput. Significantly enhanced material durability compared to state-of-the-art Si CDR tips. For long-lasting tip performance and reduced cost per measurement.

Download CDR50-EBD product flyer

Blue Line product flyer update:
HDC-40 / HDC-30 / HDC-20 – Supersharp high aspect ratio AFM tips optimized for enhanced access capabilities and consistent performance stability.

• Extended accessibility. High aspect ratio shape with an half-cone angle <3°: reliable access to topographic details even on tightly spaced arrays.
• Enhanced performance. Tilt-compensated to 3°±0.5° for significantly extended bottomwidth measurements.
• Ultra-high resolution. Supersharp tips with 2-3 nm radius for high-resolution AFM imaging.
• Improved throughput. Excellent material durability for robust measurement performance and reduced cost per measurement.

Download HDC Fine Features product flyer