Blue Line product flyer update:
M-CNT-500 – The amorphous CNT solution: ultrathin, post-like AFM tip for demanding metrology applications.

• Controlled shape. Precisely controlled tip length of 500 nm and uniform tip width of 30 nm.
• Controlled orientation. Tilt compensation within ±0.5° for enhanced access capabilities to bottom trench features.
• Constant resolution. Uniform tip width for long-lasting high-resolution measurements.
• Improved throughput. Excellent tip material properties for consistent performance and reduced cost per measurement.

Download M-CNT-500 product flyer

Publication update:
nanotools CD AFM tips featured in book publication

Discover how nanotools CD AFM tips contribute to enhance process quality control and improve yield in the semiconductor industry

• Title: Scanning Probe Microscopy in Industrial Applications: Nanomechanical Characterization, DOI: 10.1002/9781118723111
• Section: Chapter 8, Scanning Probe Microscopy for Critical Measurements in the Semiconductor Industry by Johann Foucher
• Editor: Dalia G. Yablon
• Published by: John Wiley & Sons Inc., Hoboken, NJ, U.S.A.

Visit the Wiley Online Library for details (external link)

Used with permission from John Wiley & Sons, Inc.
Copyright © 2014 by John Wiley & Sons, Inc. All rights reserved.

Conference proceedings update:
Publication in SPIE Proceedings Vol. 9424 available

Access the latest approach and results from our cooperation with POLLEN Technology and CEA LETI on dimensional measurements of CD atomic force microscopy tips.

• Title: Development of a comprehensive metrology platform dedicated to dimensional measurements of CD atomic force microscopy tips
• Published in: SPIE Proceedings Vol. 9424: Metrology, Inspection, and Process Control for Microlithography XXIX. doi: 10.1117/12.2085977
• Format: PDF 9 pages

Visit the proceedings page for details (external link)

Green Line product information:
B20 - hemispherical AFM tip for high precision indentation measurements

• Hemispherical tip shape. Reliable nanomechanical investigations and consistent data modelling.
• Tip shape radius 20 nm ±5 nm. Fabricated with nm precision.
• Force constant available from 0.2 N/m to 40 N/m. Matching a wide range of sample stiffness investigations.
• Outstanding HDC/DLC tip hardness. Repeatable and reliable deformation measurements.

See the NanoIndentation product series

Blue Line product information:
CDR50-EBD – The standard for high-performance mask inspection

• Constant reliability. Rotationally symmetric T-like shape with tight tip parameter specifications for reliable and consistent metrology measurements.
• Enhanced performance. Tilt-compensated to 3°±0.5° combined with an overhang of 10 nm for unmatched degrees of reentrancy.
• Ultra-high resolution. 5 nm tip edge radius for ultra-high resolution sidewall roughness measurements
• Improved throughput. Significantly enhanced material durability compared to state-of-the-art Si CDR tips. For long-lasting tip performance and reduced cost per measurement.

Learn more

German Engineering, Manufacturing and Quality Control:
nanotools was the first AFM probe manufacturer to be ISO 9001 certified in 2008.

• Uniform and consistent high quality products and services
• Extreme narrow specifications for AFM tip, cantilever and chip
• Full traceability of all manufacturing parameters for every AFM tip
• 100% quality check for every AFM tip

Download our latest certificate

Conference proceedings update:
Dimensional measurements of CD atomic force microscopy tips

See the first results from our cooperation with POLLEN Technology and CEA LETI on the "Development of a comprehensive metrology software platform dedicated to dimensional measurements of CD atomic force microscopy tips“.

• Conference: SPIE Advanced Lithography 2015, San Jose, California, USA
• Session: Metrology, Inspection, and Process Control for Microlithography XXIX, Session 6 AFM
• Date: Tuesday 24 February 2015, 1:20 PM - 3:00 PM
• Paper: 9424-28, presented by Johann Foucher/POLLEN Technology

Visit the SPIE proceedings page for details (external link)

Blue Line product update:
HDC-20 – supersharp, robust HAR AFM tip for very fine features

• Length 250 nm
• Width at 100nm depth <10 nm
• Tip sharpness <3 nm
• AR >10
• Tilt compensation 3°
• Resonance frequency 320 kHz
• Force constant 40 N/m

Learn more

Blue Line feature update:
TrueDimensions – online access to actual tip dimensions

• What you need
  Enter the serial number S/N given on the backside of your probe box in the TrueDimensions field. Click the arrow button.
• What you get
  Get the key probe characteristics for every individual tip. Extracted from NIST-traceable SEM measurements.

Learn more