CDR50-EBD

Blue Line product information:
CDR50-EBD – The standard for high-performance mask inspection

• Constant reliability. Rotationally symmetric T-like shape with tight tip parameter specifications for reliable and consistent metrology measurements.
• Enhanced performance. Tilt-compensated to 3°±0.5° combined with an overhang of 10 nm for unmatched degrees of reentrancy.
• Ultra-high resolution. 5 nm tip edge radius for ultra-high resolution sidewall roughness measurements
• Improved throughput. Significantly enhanced material durability compared to state-of-the-art Si CDR tips. For long-lasting tip performance and reduced cost per measurement.

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