CD AFM Tips in Semiconductor Industry

Posted 15-07-24 10:13 | Permalink: www.nanotools.com/blog/cd-afm-semi-industry.html

Publication update:
nanotools CD AFM tips featured in book publication

Discover how nanotools CD AFM tips contribute to enhance process quality control and improve yield in the semiconductor industry

Title: Scanning Probe Microscopy in Industrial Applications: Nanomechanical Characterization, DOI: 10.1002/9781118723111
Section: Chapter 8, Scanning Probe Microscopy for Critical Measurements in the Semiconductor Industry by Johann Foucher
Editor: Dalia G. Yablon
Published by: John Wiley & Sons Inc., Hoboken, NJ, U.S.A.

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