Conference proceedings update:
In-line AFM monitoring of local height variations in SADP Fin and wafer-to-wafer hybrid bonding processes

Experience how nanotools M-CNT-100 AFM tips are successfully applied to accurately extract demanding local height variations with long term reliability.

• Conference: Advanced Semiconductor Manufacturing Conference 2017, Saratoga Springs, New York, USA
• Session 7: Advanced Metrology II
• Date: Wednesday, May 17, 2017, 9:20 AM
• Title: In-line Metrology for Atomic Resolution Local Height Variation
• Speaker: Tae-Gon Kim, imec (Belgium)

Visit the ASMC conference page for details (external link)

Copyright © 2017 by SEMI.

Publication update:
nanotools biotool XXL tips featured in research article

See how nanotools biotool XXL AFM tips "allow the detailed elucidation of structural characteristics that are inaccessible with standard AFM tips".

• Title: The structure and functionality of contractile forisome protein aggregates, DOI: 10.1016/j.biomaterials.2007.09.020
• Authors: Magnus S. Jaeger, Fraunhofer Institute for Biomedical Engineering (Germany), Katja Uhlig, University of Applied Sciences Wildau (Germany), Hauke Clausen-Schaumann, Munich University of Applied Sciences and Center for Nanoscience (CeNS) Ludwig Maximilians University (Germany), Claus Duschl, Fraunhofer Institute for Biomedical Engineering (Germany)
• Publication: Biomaterials
• Publisher: Elsevier B.V.
• Date: January 2008

Visit ScienceDirect^® for details (external link)

Used with permission from Elsevier B.V. (LICENSE #: 4064640576267), AFM scans used with kind permission from Hauke Clausen-Schaumann.
Copyright © 2017 Elsevier B.V. All rights reserved.

Publication update:
nanotools M-CNT-150 AFM tips featured in research article

Discover how M-CNT-150 AFM tips help to determine the impact of DSA process flow, pattern density and BCP film thickness on template fill.

• Title: Influence of template fill in graphoepitaxy directed self-assembly
  DOI: 10.1117/1.JMM.15.3.031603
• Authors: Jan Doise, KU Leuven and imec (Belgium), Joost Bekaert, Boon Teik Chan, imec (Belgium), SungEun Hong, Guanyang Lin, EMD Performance Materials Corp. (USA), Roel Gronheid, imec (Belgium)
• Publication: Journal of Micro/Nanolithography, MEMS, and MOEMS
• Publisher: SPIE
• Date: August 2016

Visit SPIE Digital Library for details (external link)

Used with kind permission from Jan Doise and SPIE.
Copyright © 2016 SPIE. All rights reserved.

Starting January 2017, nanotools will implement the following changes on the shipment packaging of AFM probes:
     Change from blue cardboard tray boxes with one inlay for gel-boxes
     to blue cardboard telescope boxes with three inlays for gel-boxes
There are no changes to the products, packaging size and material or manufacturing location.

Why are we changing packaging? The new packaging allows for shipment of up to three gel-boxes within one single telescope box. This effectively helps to

• Minimize material waste
• Reduce transportation emissions
• Reduce shipping costs for bulk orders

nanotools new telescope box is

• 100% biodegradable
• Tested and approved according to ISO 2248 - Vertical impact test by dropping
• Made in Germany

Download Customer Notification
Contact us

Publication update:
nanotools spherical AFM tips featured in research article

See how the mechanical properties of evaporated and UV cross-linked polymer structures are reliably characterized by means of spherical full carbon AFM tips with 150 nm radius.

• Title: Molecular beam deposition of high-permittivity polydimethylsiloxane for nanometer-thin elastomer films in dielectric actuators
  DOI: 110.1016/j.matdes.2016.05.049
• Authors: Florian M. Weiss, University of Basel (Switzerland), Frederikke B. Madsen, Technical University of Denmark (Denmark), Tino Töpper, Bekim Osmani, Vanessa Leung, Bert Müller, University of Basel (Switzerland)
• Publication: Materials and Design
• Publisher: Elsevier B.V.
• Date: September 2016

Visit Science Direct^® for details (external link)

Used with permission from Elsevier B.V. (LICENSE #: 3984720874048)
Copyright © 2016 Elsevier B.V. All rights reserved.

Publication in focus:
Tae-Gon Kim et al: Atomic Resolution Quality Control for Fin Oxide Recess by Atomic Resolution Profiler DOI: 10.4028/www.scientific.net/SSP.255.304

Discover how nanotools M-CNT-100 probes are enabling a unique metrology solution for state-of-the-art semiconductor manufacturing. The currently presented technology can be effectively used for process optimization and non-destructive, in-line manufacturing process monitoring of latest FinFET devices.

• Experimental setup:
  Samples: SADP Si Fin with 45 nm pitch after oxide recess process
  Tool: Park NX-3DM, Park Systems
  AFM probe: M-CNT-100 for Park AAFM, nanotools
• Extracted feature parameters:
  Along Fin trench: Oxide recess profile variation
  Across wafer: Fin profile, oxide recess profile, oxide footing shape uniformity
• Key findings:
  Long term repeatability: Fin height 3σ < 0.6 nm (90 measurements)
  Throughput: 1000+ dies on 50+ wafers with one individual M-CNT-100
  Measurement time: < 2 min/site
  Accuracy: dimensional verification by HRTEM

Visit Scientific.Net for details (external link)

Used with permission from Trans Tech Publications Inc. in accordance with Copyright Transfer Agreement, Section B, Item 5.
Copyright © 2016 Trans Tech Publications Inc. All rights reserved.

Publication update:
nanotools supersharp EBD-SSS tips featured in research article

Explore how nanotools supersharp EBD-SSS tips reveal nanoporous structures on individual carbon fibers, which are unattainable with standard silicon probes

• Title: High-resolution imaging of the nanostructured surface of polyacrylonitrile-based fibers, DOI: 10.1007/s10853-016-0197-9
• Authors: Christina Kunzmann, Judith Moosburger-Will, Siegfried Horn, University of Augsburg (Germany)
• Publication: Journal of Materials Science
• Publisher: Springer International Publishing
• Date: November 2016

Visit SpringerLink for details (external link)

Used with permission from Springer International Publishing (LICENSE #: 3965240981681).
Copyright © Springer Science+Business Media New York 2016. All rights reserved.

Publication update:
nanotools M-CNT-100 tips in research article

Discover how nanotools M-CNT-100 tips enable to gain insight into oxide recess uniformity in FinFET devices

• Title: Atomic Resolution Quality Control for Fin Oxide Recess by Atomic Resolution Profiler, DOI: 10.4028/www.scientific.net/SSP.255.304
• Authors: Tae-Gon Kim, imec (Belgium) and Hanyang University (Republic of Korea), Heon-Yul Ryu, Hanyang University (Republic of Korea), Karine Kenis, imec (Belgium), Ah-jin Jo, Sang-Joon Cho, Sang-Il Park, Park Systems (Republic of Korea), Sebastian Schmidt, Bernd Irmer, nanotools (Germany)
• Publication: Solid State Phenomena (Volume 255), Ultra Clean Processing of Semiconductor Surfaces XIII
• Section: Chapter 9: Metrology, Specification and Control of Contamination, pages 304-308.
• Editors: Paul W. Mertens, Marc Meuris and Marc Heyns
• Publisher: Trans Tech Publications Inc.
• Date: September 2016

Visit Scientific.Net for details (external link)

Used with permission from Trans Tech Publications Inc. in accordance with Copyright Transfer Agreement, Section B, Item 5.
Copyright © 2016 Trans Tech Publications Inc. All rights reserved.

Blue Line product update:
QUANTUM-PRO: The New Standard for Fast Scanning Applications

• Consistent Tuning. 1.2 MHz rectangular quartz cantilevers with tip position mark on cantilever backside. 1.1 - 1.3 MHz guaranteed.
• Consistent Sharpness. Tip radius 5-6 nm guaranteed. For reliable scanning performance and unmatched tip to tip repeatability.
• Carbon Durability. Long lasting full diamond, amorphous carbon tip.
• nanotools Precision. Every probe measured and quality inspected. Datasheet with exact data, full traceability for every probe.

Download full spec sheet
Contact us

Publication update:
nanotools spherical AFM tips featured in research article

Learn how precisely shaped full carbon AFM tips with 500 nm radius help to gain reliable information about the mechanical properties of DEA structures

• Title: Stress measurements of planar dielectric elastomer actuators, DOI: 10.1063/1.4949519
• Authors: Bekim Osmani, Elise A. Aeby, and Bert Müller, University of Basel (Switzerland)
• Publication: Review of Scientific Instruments
• Publisher: AIP Publishing LLC
• Date: May 2016

Visit AIP Publishing for details (external link)

Used with permission from AIP Publishing LLC
Copyright © 2016 AIP Publishing LLC. All rights reserved.