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Atomic Resolution Quality Control for Fin Oxide Recess

Posted 16-09-30 16:39
TransTech_Pub Publication update:
nanotools M-CNT-100 tips in research article

Discover how nanotools M-CNT-100 tips enable to gain insight into oxide recess uniformity in FinFET devices
Visit Scientific.Net for details (external link)

Used with permission from Trans Tech Publications Inc. in accordance with Copyright Transfer Agreement, Section B, Item 5.
Copyright © 2016 Trans Tech Publications Inc. All rights reserved.

High-resolution imaging of polyacrylonitrile-based fibers

Posted 16-10-31 09:32
JMatSci-11-2016 Publication update:
nanotools supersharp EBD-SSS tips featured in research article

Explore how nanotools supersharp EBD-SSS tips reveal nanoporous structures on individual carbon fibers, which are unattainable with standard silicon probes
Visit SpringerLink for details (external link)

Used with permission from Springer International Publishing (LICENSE #: 3965240981681).
Copyright © Springer Science+Business Media New York 2016. All rights reserved.

Mechanical properties of nanometer-thin polymer films

Posted 17-01-09 08:48
JMatDes_Pub Publication update:
nanotools spherical AFM tips featured in research article

See how the mechanical properties of evaporated and UV cross-linked polymer structures are reliably characterized by means of spherical full carbon AFM tips with 150 nm radius.
Visit Science Direct® for details (external link)

Used with permission from Elsevier B.V. (LICENSE #: 3984720874048)
Copyright © 2016 Elsevier B.V. All rights reserved.

In focus: Atomic resolution Fin FET metrology

Posted 16-12-01 10:41
TransTech_Pub Publication in focus:
Tae-Gon Kim et al: Atomic Resolution Quality Control for Fin Oxide Recess by Atomic Resolution Profiler DOI: 10.4028/www.scientific.net/SSP.255.304

Discover how nanotools M-CNT-100 probes are enabling a unique metrology solution for state-of-the-art semiconductor manufacturing. The currently presented technology can be effectively used for process optimization and non-destructive, in-line manufacturing process monitoring of latest FinFET devices.
Visit Scientific.Net for details (external link)

Used with permission from Trans Tech Publications Inc. in accordance with Copyright Transfer Agreement, Section B, Item 5.
Copyright © 2016 Trans Tech Publications Inc. All rights reserved.

AFM monitoring of template fill in graphoepitaxy DSA

Posted 17-02-06 14:24
JM3_Pub Publication update:
nanotools M-CNT-150 AFM tips featured in research article

Discover how M-CNT-150 AFM tips help to determine the impact of DSA process flow, pattern density and BCP film thickness on template fill.
Visit SPIE Digital Library for details (external link)

Used with kind permission from Jan Doise and SPIE.
Copyright © 2016 SPIE. All rights reserved.

Customer Notification: Packaging Improvement

Posted 17-01-13 16:30
Packaging Improvement Starting January 2017, nanotools will implement the following changes on the shipment packaging of AFM probes:
     Change from blue cardboard tray boxes with one inlay for gel-boxes
     to blue cardboard telescope boxes with three inlays for gel-boxes

There are no changes to the products, packaging size and material or manufacturing location.

Why are we changing packaging? The new packaging allows for shipment of up to three gel-boxes within one single telescope box. This effectively helps to nanotools new telescope box is Download Customer Notification
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Structural characteristics of forisome aggregates

Posted 17-04-03 08:27
Biomat-03-2017 Publication update:
nanotools biotool XXL tips featured in research article

See how nanotools biotool XXL AFM tips "allow the detailed elucidation of structural characteristics that are inaccessible with standard AFM tips".
Visit ScienceDirect® for details (external link)

Used with permission from Elsevier B.V. (LICENSE #: 4064640576267), AFM scans used with kind permission from Hauke Clausen-Schaumann.
Copyright © 2017 Elsevier B.V. All rights reserved.

Advanced Semiconductor Manufacturing Conference 2017

Posted 17-05-02 14:18
ASMC_2017 Conference proceedings update:
In-line AFM monitoring of local height variations in SADP Fin and wafer-to-wafer hybrid bonding processes

Experience how nanotools M-CNT-100 AFM tips are successfully applied to accurately extract demanding local height variations with long term reliability.
Visit the ASMC conference page for details (external link)

Copyright © 2017 by SEMI.

Topology and mechanics of heterotypic collagen fibrils

Posted 17-06-01 09:17
SciRepo_Pub Publication update:
nanotools spherical AFM tips featured in research article

See how the differences between the mechanical properties of heterotypic collagen fibrils are reliably characterized using spherical full carbon AFM tips with 50 nm radius.
Visit Nature for details (external link)

Permission distributed under Creative Commons Attribution 4.0 International License.
Copyright © 2017 The Author(s).

Investigating the stiffness of sputtered Au on PDMS

Posted 17-07-31 10:52
SPIE042016_Pub Publication update:
nanotools spherical AFM tips featured in conference proceedings

Learn how the stiffness of sputtered Au on polydimethylsiloxane as a function of Au layer thickness is extracted by using spherical full carbon AFM tips with 500 nm radius.
Visit SPIE Digital Library for details (external link)

Used with kind permission from Bekim Osmani and SPIE.
Copyright © 2016 SPIE. All rights reserved.

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