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German National Metrology Institute (PTB) Scientists study CD-AFM and TEM for reference EUV Photomask Metrology

Posted 22-03-30 08:15 | Permalink:
Publication update:
nanotools CDR30-EBD probes featured in research article

Discover how nanotools CDR30-EBD with precisely controlled 30 nm width is applied to measure nanostructures of EUV photomask standards.
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