V-Groove and Rectangular Single Crystal Diamond Diffraction Gratings Characterized by SEM and AFM
Posted 22-06-29 16:48 | Permalink: www.nanotools.com/blog/v-groove-and-rectangular-single-crystal-diamond-diffraction-gratings-characterized-by-sem-and-afm.html
Publication update:
nanotools EBD2-100A featured in research article
Discover how nanotools tilt compensated, high aspect ratio EBD2-100A is applied to accurately profile sidewall roughness and measure sidewall angles.
- Title: High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching
DOI: 10.1364/OE.27.030371 - Authors: Marcell Kiss, Teodoro Graziosi, Adrien Toros, Toralf Scharf, Christian Santschi, Olivier J. F. Martin, and Niels Quack
- Publication: Optics Express
- Publisher: Optica Publishing Group (formerly OSA)
- Date: October 14, 2019
© 2019 Optical Society of America
under the terms of the OSA Open Access Publishing Agreement
