EBD-FMR
| Part numberNT_EBD_v0050 | ||
| Tip | ||
| Material | HDC/DLC | |
| Shape | conical | |
| Tip length / l | n/a | |
| Diameter / d | n/a | |
| Half cone angle / Φ | n/a | |
| Radius / r | 7 nm | (<10 nm) |
| Tilt compensation / θ | n/a | |
| Pyramid height / PH | 15 µm | (10-15 µm) |
| Tip set back / TSB | 15 µm | (5-25 µm) |
| Cantilever | ||
| Material | Si | |
| Shape | FMR | |
| Length / L | 225 µm | |
| Width / W | 28 µm | |
| Thickness / T | 3 µm | |
| Force constant / k | 2.8 N/m | |
| Resonance Frequency / f | 75 kHz | |
| Coating | ||
| Tip side | none | |
| Back side | reflex | |
| Chip | ||
| Length / L_Chip | 3400 µm | |
| Width / W_Chip | 1600 µm | |
| Thickness / T_Chip | 315 µm | |
| Alignment grooves | yes | |
n/a: specification not applicable for this product
Numbers in parentheses: guaranteed range
Handling sheet
Packaging
Set of 5
