Blue Line

Solutions for industry, in–line metrology, automated AFM tools.

Ultimate precision

For the most stringent demands of fully automated AFM metrology tools. Extremely tight specifications for all critical probe dimensions including mounting chip, cantilever and AFM tip for excellent probe to probe consistency. High density diamond-like carbon (HDC/DLC) AFM tips provide the industry's best cost per measurement and lower total cost due to fewer tip exchanges and higher throughput.

We guarantee 100% quality control of every individual Blue Line AFM tip and provide online datasheets with the key probe characteristics extracted from NIST-traceable SEM measurements.

HAR Trench Profiling

AFM tips dedicated to the most challenging high aspect ratio metrology applications.

Extreme Aspect Ratio
High Aspect Ratio
HDC Fine Features
MCNT

Roughness Measurements

Ultra high resolution AFM tips with an extremely sharp tip apex radius.

Enhanced Resolution
Fast Scanning

3D CD Metrology

T-shape-like 3D AFM tips for most advanced process monitoring.

3D CD Metrology

Fine Feature Control

Optimum scanning stability and durability in conventional, fast or assisted AFM modes.

HDC Fine Features
MCNT
Fast Scanning
EBD-TESPA Probes