Metrology Super Sharp (MSS): Heavy-Duty Carbon Tips for Very Narrow HAR Trenches

Blue Line product highlight:
MSS 4-Star: A durable depth metrology solution for consistent bottom access of finest features

Controlled shape:
Precisely controlled length of 100 nm and width of 10 nm measured at 50 nm from apex
Controlled orientation: 12° or 3°
Tilt compensation within ±1° or ±0.5° for enhanced access capabilities to bottom trench features
Optimized cantilevers:
Standard with with k: 2.8 N/m, f: 75 kHz or k: 40 N/m, f: 320 kHz
Other cantilevers available upon request
Diamond-like hardness and durability:
Unmatched diamond-like carbon wear resistance for consistent performance and reduced cost per measurement
Delivered with TrueDimensions™:
Datasheet for every single probe available online 24/7 via QR code