Atomic Resolution Quality Control for Fin Oxide Recess
Posted 16-09-30 16:39 | Permalink: www.nanotools.com/blog/atomic-resolution-quality-control-for-fin-oxide-recess.html
Publication update:nanotools M-CNT-100 tips in research article
Discover how nanotools M-CNT-100 tips enable to gain insight into oxide recess uniformity in FinFET devices
- Title: Atomic Resolution Quality Control for Fin Oxide Recess by Atomic Resolution Profiler, DOI: 10.4028/www.scientific.net/SSP.255.304
- Authors: Tae-Gon Kim, imec (Belgium) and Hanyang University (Republic of Korea), Heon-Yul Ryu, Hanyang University (Republic of Korea), Karine Kenis, imec (Belgium), Ah-jin Jo, Sang-Joon Cho, Sang-Il Park, Park Systems (Republic of Korea), Sebastian Schmidt, Bernd Irmer, nanotools (Germany)
- Publication: Solid State Phenomena (Volume 255), Ultra Clean Processing of Semiconductor Surfaces XIII
- Section: Chapter 9: Metrology, Specification and Control of Contamination, pages 304-308.
- Editors: Paul W. Mertens, Marc Meuris and Marc Heyns
- Publisher: Trans Tech Publications Inc.
- Date: September 2016
Used with permission from Trans Tech Publications Inc. in accordance with Copyright Transfer Agreement, Section B, Item 5.
Copyright © 2016 Trans Tech Publications Inc. All rights reserved.
