AFM monitoring of template fill in graphoepitaxy DSA

Posted 17-02-06 14:24 | Permalink: www.nanotools.com/blog/afm-monitoring-of-template-fill-in-graphoepitaxy-dsa.html

Publication update:
nanotools M-CNT-150 AFM tips featured in research article

Discover how M-CNT-150 AFM tips help to determine the impact of DSA process flow, pattern density and BCP film thickness on template fill.

Title: Influence of template fill in graphoepitaxy directed self-assembly
DOI: 10.1117/1.JMM.15.3.031603
Authors: Jan Doise, KU Leuven and imec (Belgium), Joost Bekaert, Boon Teik Chan, imec (Belgium), SungEun Hong, Guanyang Lin, EMD Performance Materials Corp. (USA), Roel Gronheid, imec (Belgium)
Publication: Journal of Micro/Nanolithography, MEMS, and MOEMS
Publisher: SPIE
Date: August 2016

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