AFM monitoring of template fill in graphoepitaxy DSA
Posted 17-02-06 14:24 | Permalink: www.nanotools.com/blog/afm-monitoring-of-template-fill-in-graphoepitaxy-dsa.html
Publication update:
nanotools M-CNT-150 AFM tips featured in research article
Discover how M-CNT-150 AFM tips help to determine the impact of DSA process flow, pattern density and BCP film thickness on template fill.
Used with kind permission from Jan Doise and SPIE.
Copyright © 2016 SPIE. All rights reserved.
nanotools M-CNT-150 AFM tips featured in research article
Discover how M-CNT-150 AFM tips help to determine the impact of DSA process flow, pattern density and BCP film thickness on template fill.
- Title: Influence of template fill in graphoepitaxy directed self-assembly
DOI: 10.1117/1.JMM.15.3.031603 - Authors: Jan Doise, KU Leuven and imec (Belgium), Joost Bekaert, Boon Teik Chan, imec (Belgium), SungEun Hong, Guanyang Lin, EMD Performance Materials Corp. (USA), Roel Gronheid, imec (Belgium)
- Publication: Journal of Micro/Nanolithography, MEMS, and MOEMS
- Publisher: SPIE
- Date: August 2016
Used with kind permission from Jan Doise and SPIE.
Copyright © 2016 SPIE. All rights reserved.