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AFM monitoring of template fill in graphoepitaxy DSA

Posted 17-02-06 14:24 | Permalink:
JM3_Pub Publication update:
nanotools M-CNT-150 AFM tips featured in research article

Discover how M-CNT-150 AFM tips help to determine the impact of DSA process flow, pattern density and BCP film thickness on template fill.
Visit SPIE Digital Library for details (external link)

Used with kind permission from Jan Doise and SPIE.
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