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In focus: Atomic resolution Fin FET metrology

Posted 16-12-01 10:41 | Permalink:
TransTech_Pub Publication in focus:
Tae-Gon Kim et al: Atomic Resolution Quality Control for Fin Oxide Recess by Atomic Resolution Profiler DOI: 10.4028/

Discover how nanotools M-CNT-100 probes are enabling a unique metrology solution for state-of-the-art semiconductor manufacturing. The currently presented technology can be effectively used for process optimization and non-destructive, in-line manufacturing process monitoring of latest FinFET devices.
Visit Scientific.Net for details (external link)

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