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Studying EUV Mask Absorber Side Wall Angle and Thickness Using AFM

Posted 23-07-30 03:18 | Permalink:
Publication update:
nanotools MCNT-500™ featured in research article

Discover how nanotools 500nm long, tilt compensated, high aspect ratio MCNT-500™ is applied for side wall angle and thickness measurements on EUV masks.
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