E-AFM Nanolithography Approach Enables High-Resolution Nanopatterning
Posted 23-10-31 03:30 | Permalink: www.nanotools.com/blog/e-afm-nanolithography-approach-enables-high-resolution-nanopatterning.html
Publication update:
nanotools MCNT-500™ featured in research article
Discover how nanotools 500nm long, tilt compensated, high aspect ratio MCNT-500™ is applied for imaging and characterization of lithography features dimensions (depth and width).
- Title: Electric-Field-Assisted Contact Mode Atomic Force Microscope-Based Nanolithography With Low Stiffness Conductive Probes
DOI: 10.1115/1.4054316 - Authors: Zhou, H., Jiang, Y., Dmuchowski, C. M., Ke, C., and Deng, J.
- Publication: Journal of Micro- and Nano-Manufacturing
- Publisher: ASME International
- Date: 28 April 20229
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