MCNT-500: Workhorse of more than 10 years in semi fab metrology now available with 12 deg tilt compensation
Posted 18-08-01 18:39 | Permalink: www.nanotools.com/blog/mcnt-500-workhorse-of-10-years-in-semi-fab-metrology.html
MCNT-500™: The original amorphous CNT solution for demanding depth metrology applications
- Controlled orientation: 3° or 12°:
Tilt compensation within ±0.5° for enhanced access capabilities to bottom trench features - Controlled shape:
Precisely controlled length of 500 nm and uniform width of 30 nm - Optimized cantilevers:
Standard with k: 40 N/m, f: 320 KHz
Softer cantilevers for force-controlling scanning modes available upon request - Diamond-like hardness and durability:
Exceptional wear resistance of diamond-like carbon for consistent
performance and reduced cost per measurement - Delivered with TrueDimensions:
Datasheet for every single probe available online 24/7 via QR code
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