M-CIS
| Part numberNT_MCIS_v0010 | ||
| Tip | ||
| Material | HDC/DLC | |
| Shape | conical | |
| Tip length / l | 400 nm | (±100 nm) |
| Diameter / d | n/a | |
| Half cone angle / Φ | <4° | (AR>5) |
| Radius / r | 10 nm | (±2 nm) |
| Tilt compensation / θ | 13° | (±1°) |
| Pyramid height / PH | 15 µm | (10-15 µm) |
| Tip set back / TSB | 15 µm | (5-25 µm) |
| Cantilever | ||
| Material | Si | |
| Shape | NT-RTESPA | |
| Length / L | 120 µm | (±5 µm) |
| Width / W | 30 µm | (±2 µm) |
| Thickness / T | 4.4 µm | (±0.5 µm) |
| Force constant / k | 40 N/m | (±20 N/m) |
| Resonance Frequency / f | 320 kHz | (±50 kHz) |
| Coating | ||
| Tip side | none | |
| Back side | reflex | |
| Chip | ||
| Length / L_Chip | 3400 µm | |
| Width / W_Chip | 1600 µm | |
| Thickness / T_Chip | 315 µm | |
| Alignment grooves | no | |
n/a: specification not applicable for this product
Numbers in parentheses: guaranteed range
Handling sheet
Packaging
Set of 5
