AFM Nanometrology Of Hard Sapphire Micro-bumps With Excellent Repeatability

Publication update:

nanotools tilt-corrected M-CIS probes with 400 nm length and 4˚ half cone angle featured in research article

Discover how very durable nanotools M-CIS are applied to measure height, diameters, pitch, and side angles of Patterned Sapphire Substrate.

Title: Automatic Patterned Sapphire Substrate Nanometrology Using Atomic Force Microscope
DOI: 10.1109/TNANO.2015.2392128
Authors: Shao-Kang Hung; Chiao-Hua Cheng, and Cheng-Lung Chen
Publication: IEEE Transactions on Nanotechnology
Publisher: IEEE
Date: January 2015