AFM Nanometrology Of Hard Sapphire Micro-bumps With Excellent Repeatability
Posted 20-09-30 19:02 | Permalink: www.nanotools.com/blog/afm-nanometrology-of-hard-sapphire-micro-bumps-with-excellent-repeatability.html
Publication update:
nanotools tilt-corrected M-CIS probes with 400 nm length and 4˚ half cone angle featured in research article
Discover how very durable nanotools M-CIS are applied to measure height, diameters, pitch, and side angles of Patterned Sapphire Substrate.
- Title: Automatic Patterned Sapphire Substrate Nanometrology Using Atomic Force Microscope
DOI: 10.1109/TNANO.2015.2392128 - Authors: Shao-Kang Hung; Chiao-Hua Cheng, and Cheng-Lung Chen
- Publication: IEEE Transactions on Nanotechnology
- Publisher: IEEE
- Date: January 2015
Copyright © 2015, IEEE