EBD8-600A: Semi fab metrology workhorse for extreme HAR trench profiling
Posted 21-01-31 08:44 | Permalink: www.nanotools.com/blog/ebd8-600a-semi-fab-metrology-workhorse-for-extreme-har-trench-profiling.html
EBD8-600A: High performance replacement for FIB silicon AFM tips.
-
Optimized conical shape for enhanced stability
AR > 10: precisely controlled length up to 8 µm and tightly controlled diameters at 1 and 5 µm from apex -
Diamond-like hardness and durability
Exceptional wear resistance for consistent depth data, enhanced throughput, and reduced cost per measurement -
Controlled orientation: 12° or 3°
Tilt compensation for enhanced access to bottom trench features -
Optimized cantilevers
Standard with k: 40 N/m, f: 320 KHz. Softer cantilevers available. - Delivered with TrueDimensions™
Datasheet for every single probe available online 24/7 via QR code