EBD-16: Semi Fab proven solution for extreme deep trench metrology

Blue Line product highlight:
EBD-16™: World's longest high-performance AFM tip.

• Optimized conical shape for enhanced stability
  Precisely controlled DLC spike length > 16 µm (Total tip length > 26 µm)
• Controlled orientation: 12°, 13° or 3°
  Tilt compensation for enhanced access to bottom trench features
• Diamond-like hardness and durability
  Unmatched wear resistance for consistent depth data, enhanced throughput, and reduced cost per measurement
• Optimized cantilevers
  Standard with k: 40 N/m, f: 320 kHz. Softer cantilevers available.
• Delivered with TrueDimensions™
  Datasheet for every single probe available online 24/7 via QR code