Blue LineSolutions for industry, in–line metrology, automated AFM tools.
For the most stringent demands of fully automated AFM metrology tools. Extremely tight specifications for all critical probe dimensions including mounting chip, cantilever and AFM tip for excellent probe to probe consistency. High density diamond-like carbon (HDC/DLC) AFM tips provide the industry's best cost per measurement and lower total cost due to fewer tip exchanges and higher throughput.
We guarantee 100% quality control of every individual Blue Line AFM tip and provide online datasheets with the key probe characteristics extracted from NIST-traceable SEM measurements.
HAR Trench Profiling
AFM tips dedicated to the most challenging high aspect ratio metrology applications.
Ultra high resolution AFM tips with an extremely sharp tip apex radius.Enhanced Resolution
3D CD Metrology
T-shape-like 3D AFM tips for most advanced process monitoring.3D CD Metrology