EBD-CDR BOOT for 3D CD Metrology
diamond-like hardness for long lasting performance
Boot widths from 15 to 130 nm
Overhang: 5 - 30 nm / Edge radius: 5 nm
Unchanging vertical edge height of 10 nm
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The probe of choice for 3D CD metrology
Significantly improved lifetime
Improved reliability and throughput
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Compatible with all major
commercially available AFM's.
Featuring standard cantilevers
and chip dimensions.