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NIST scientists study CD-AFM tip lifetime and wear rate: impact on measurement variability and cost

Posted 20-04-10 00:06 | Permalink: www.nanotools.com/blog/nist-scientists-study-cd-afm-tip-lifetime-and-wear-rate-impact-on-measurement-variability-and-cost.html

CDR50-EBD

Publication update:

nanotools CDR50-EBD probes used in study published by NIST researchers

Discover how the wear behavior of nanotools CDR50-EBD with controlled 50 nm diameter compare to that of standard CDR silicon probes.

Title: Wear comparison of critical dimension-atomic force microscopy tips
DOI: 10.1117/1.JMM.19.1.014004
Authors: Ndubuisi G. Orji, Ronald G. Dixson, Ernesto Lopez, Bernd Irmer
Publication: Journal of Micro/Nanolithography, MEMS, and MOEMS
Publisher: SPIE - Intl. Society for Optical Engineering
Date: March 28, 2020

Visit Journal of Micro/Nanolithography, MEMS, and MOEMS for details
(external link)

Download paper from NIST website - Local Download (external link)

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