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M1-ESD

Part numberNT_M1_v0020
Tip
MaterialHDC/DLC
Shapeconical
Tip length / l800 nm(±200 nm)
Diameter / d (measured at 600 nm)75 nm(±10 nm)
Half cone angle / Φ<3°(AR>8)
Radius / r<8 nm(<10 nm)
Tilt compensation / θ13°(±1°)
Pyramid height / PH15 µm(10-15 µm)
Tip set back / TSB15 µm(5-25 µm)
Cantilever
MaterialSi
ShapeNT-RTESPA
Length / L120 µm(±5 µm)
Width / W30 µm(±2 µm)
Thickness / T4.4 µm(±0.5 µm)
Force constant / k40 N/m(±20 N/m)
Resonance Frequency / f320 kHz(±50 kHz)
Coating
Tip sidenon ESD
Back sidenone
Chip
Length / L_Chip3400 µm
Width / W_Chip1600 µm
Thickness / T_Chip315 µm
Alignment groovesno

n/a: specification not applicable for this product
Numbers in parentheses: guaranteed range

Handling sheet

Packaging

Set of 5