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EBD-FESPA

Part numberEBD-FESPA
Tip
MaterialHDC/DLC
Shapeconical
Tip length / ln/a
Diameter / dn/a
Half cone angle / Φn/a
Radius / r7 nm(< 10 nm)
Tilt compensation / θn/a
Pyramid height / PH15 µm(10-15 µm)
Tip set back / TSB15 µm(5-25 µm)
Cantilever
MaterialSi
ShapeNT-FESPA
Length / L225 µm(±25 µm)
Width / W28 µm(± 5µm)
Thickness / T3 µm(±0.5 µm)
Force constant / k2.8 N/m(1-5 N/m)
Resonance Frequency / f75 kHz(50-100 kHz)
Coating
Tip sidenone
Back sidereflex
Chip
Length / L_Chip3400 µm
Width / W_Chip1600 µm
Thickness / T_Chip315 µm
Alignment groovesyes

n/a: specification not applicable for this product
Numbers in parentheses: guaranteed range

Product Flyer

Handling sheet

Packaging

Set of 5