— new products —


CDR-EBD
3D-AFM metrology probes:
50 / 40 / 30 / 20 / 15 nm

CDR15-EBD 50 nm state-of-the-art CDR silicon probe (left) in comparison to the newly released 15 nm CDR15-EBD (right).

The nanotools CDR-EBD probe for 3D reference and hybrid metrology:
with a full range of CDR-EBD probes from 130 nm down to 15 nm, this is pushing the limits of 3D-AFM technology for measuring tight dimensions and extending its capability for future nodes:

- made of bulk, amorphous, high-density, diamondlike carbon (HDC/DLC), extreme low tip wear.

- 5 new models with total tip width of 50 / 40 / 30 / 20 and 15 nm.

- proprietary tip shape: the tip maintains its resolution over entire lifetime.

- small tip radius.

- maximized overhang / lateral reach capability.


>> CDR-EBD probes

 

 

 

 


 




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nanotools. precise. durable.

We make simply the most precise, most durable and most advanced AFM probes in the world. nanotools CarbonNanoTips. For the ultimate precision in automated AFM systems. For the ultimate performance in research and science. For the ultimate flexibility with customized tip-cantilever solutions, starting from a set of 5 tips up to wafers with 400 tips each.

 

High Aspect Ratio

High Aspect RatioExcellent lifetime and reliability for high aspect ratio applications.

High Resolution

High ResolutionSpecial tapping mode AFM Probes for super sharp measurements.

 


General Purpose

General Purpose Special tips for High Speed AFM, biological and nanoindentation applications.

Custom Made

Custom MadeCreate your own probes with cantilever and tip dimensions of your personal choice.


  • Precise. 2 nm sharpness. Better than 0.5 ° tip orientation. nanometer accuracy in tip length and diameter.
  • Durable. Made of amorphous, high density diamondlike carbon (HDC/DLC). Mechanical robustness eight times better than that of silicon, inert to most chemicals, smooth hydrophobic tip surface.
  • Accurate. Well-defined, conical, rotation-symmetric single-tip shape. All dimensions controlled within nanometer precision.
  • Fits all. Compatible with almost all noncontact AFM systems, including automated in-fab tools.
  • Value. Lowest cost per measurement in the market.
  • Quality. Good-tip guarantee. 100% SEM check for every tip. nanotools® quality certified per DIN EN ISO 9001. Product specification provided on individual datasheet for each probe.
  • Ready. Fully automated probe manufactruing process. Track record of supplying semiconductor industry for > 15 years. Most probes are on stock, ready to ship same day.

    nanotools CarbonNanoTips are made of high density, amorphous diamondlike carbon (HDC/DLC), using our patented EBD technology. For the cantilever and chip assembly we use single crystal silicon and SiNi among other materials. A wide range of different cantilever designs, beam as well as triangular, force constant and resonance frequencies is available, which fit your AFM system and your application. From contact to MHz resonance, from scanning in air to scanning in liquid.