MSS_SuperSharpTrench
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SuperSharp, High Aspect Ratio Probe For Very Fine Features Such As Divots, 10 nm Holes etc.
Ordercode: MSS_NCHR_13
Multipurpose high resolution probe with excellent
lifetime and reliability. The nanotools® MSS_NCHR_13 tip is designed for
non-contact / high frequency mode. It delivers
outstanding resolution in critical AFM applications
even on hard, tip eating samples like ceramics, silicon oxide/nitride or polysilicon to name a few.
Tip Spec
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| Sketch Tip Spec |
| nominal | range | |
| Shape | conical | |
| Tip length (l) | 400 nm | +/- 100 nm |
| Tip radius (r) | 2-3 nm | < 5 nm |
| Tip diameter (d) measured at 300 nm |
40 nm |
+/- 10 nm |
| Tilt compensation |
13 deg | +/- 1 deg |
| Pyramide height (PH) |
15 µm | 10-15 µm |
| Tip set back (TSB) |
15 µm | 5-25 µm |
Cantilever Spec
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| Sketch Cantilever Spec |
| nominal | range | |
| Type | TESP / NCH | |
| Shape | beam | |
| Force Const. | 42 N/m | 20-75 N/m |
| Res. Frequency | 320 kHz | 270-350 kHz |
| Length (l) |
125 µm | 115-135 µm |
| Width (w) |
30 µm | 22-38 µm |
| Thickness (t) |
4 µm | 3-5 µm |
Coating
Tip side: none
Back side: 30 nm Al reflex
Certified Quality
We do a 100% SEM quality check for every tip (datasheet with precise tip dimensions provided). Every tip is handled in an ESD closed circle, clean room packed and vacuum sealed for shipment.
nanotools is the first and only probe manufacturer being quality certified to DIN EN ISO 9001.
EBD
The high aspect ratio part of the probe is made from High Density, diamond like carbon (HDC/DLC).
The tips show superior properties:
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high aspect ratio
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hydrophobic surface properties
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high stiffness / elastic modulus (8x of that of silicon)
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low thermal mass
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abrasion resistance
Our HDC dissipates static charge. This leads to probes offering the extreme durability of diamond together with high resolution imaging capability. Applying our patented EBD technique we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.