MC90/70 for Veeco Dx
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nanotools Probe for 90 and 70 nm
Inline Depth Metrology
Ordercode: MC90-70_ArrowNCR_3
The
nanotools® MC90/70 probes feature a perfectly
cylindrical tip shape providing
the highest repeatability of depth and bottom width measurements (constant
bottom travel distance). The nanotools® MC90/70 high aspect ratio probes with
cylindrical shape are the AFM In-Line metrology solution for 90 nm and 70 nm. MC
tips are tilt compensated and are available for most AFM systems.
Tip Spec
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| Sketch Tip Spec |
| nominal | range | |
| Shape | cylindrical | |
| Tip length (l) | 800 nm | +/- 200 nm |
| Tip radius (r) | < 5 nm | < 7 nm |
| Tip diameter (d) |
55 nm |
+/- 5 nm |
| Tilt compensation |
3 deg | +/- 0.5 deg |
| Pyramide height (PH) |
15 µm | 10-15 µm |
| Tip set back (TSB) |
5.2 µm | 4-5.5 µm |
Cantilever Spec
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| Sketch Cantilever Spec |
| nominal | range | |
| Type | ArrowNCR | |
| Shape | beam | |
| Force Const. | 42 N/m | 27-80 N/m |
| Res. Frequency | 285 kHz | 240-380 kHz |
| Length (l) |
160 µm | 150-170 µm |
| Width (w) |
45 µm | 37.5-52.5 µm |
| Thickness (t) |
4 µm | 3-5 µm |
Coating
Tip side: none
Back side: 30 nm Al reflex
Certified Quality
We do a 100% SEM quality check for every tip (datasheet with precise tip dimensions provided). Every tip is handled in an ESD closed circle, clean room packed and vacuum sealed for shipment.
nanotools is the first and only probe manufacturer being quality certified to DIN EN ISO 9001.
EBD
The high aspect ratio part of the probe is made from High density, diamond like carbon (HDC/DLC).
The tips show superior properties:
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high aspect ratio
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hydrophobic surface properties
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high stiffness / elastic modulus (8x of that of silicon)
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low thermal mass
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abrasion resistance
Our HDC dissipates static charge. This leads to probes offering the extreme durability of diamond together with high resolution imaging capability. Applying our patented EBD technique we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.