M1-ESD_NCH_13
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Multipurpose High Aspect Ratio EBD Probe
Ordercode: M1_ESD_NCH_13
The nanotools® M1-ESD_NCH_13 probes are designed for
non-contact/ high frequency mode, in particular for
automated AFM systems for
in-line process control as well
as general purpose AFM. Its special anti-ESD
coating delivers metallic conductivity of the probe without weakening its
mechanical strength. For most applications the conductivity of the standard
probe (either EBD or highly doped silicon) is
sufficient to dissipate static
charge - an electric discharge
would immediately destroy the tip.
However, some
applications such as scanning ceramics or photomasks require an even higher
level of ESD precautions. Therefor the nanotools® M1-ESD_NCH_13 is the choice.
Key features are excellent lifetime and reliability
for high aspect
ratio applications, where charging of the sample is an issue.
Tip Spec
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| Sketch Tip Spec |
| nominal | range | |
| Shape | conical | |
| Tip length (l) | 800 nm | +/- 200 nm |
| Tip radius (r) | < 5 nm | < 10 nm |
| Tip diameter (d) measured at 600 nm |
70 nm |
+/- 10 nm |
| Tilt compensation |
13 deg | +/- 1 deg |
| Pyramide height (PH) |
15 µm | 10-15 µm |
| Tip set back (TSB) |
15 µm | 5-25 µm |
Cantilever Spec
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| Sketch Cantilever Spec |
| nominal | range | |
| Type | TESP / NCH | |
| Shape | beam | |
| Force Const. | 42 N/m | 20-75 N/m |
| Res. Frequency | 320 kHz | 270-350 kHz |
| Length (l) |
125 µm | 115-135 µm |
| Width (w) |
30 µm | 22-38 µm |
| Thickness (t) |
4 µm | 3-5 µm |
Coating
Tip side: very thin Al
Back side: none
Certified Quality
We do a 100% SEM quality check for every tip (datasheet with precise tip dimensions provided). Every tip is handled in an ESD closed circle, clean room packed and vacuum sealed for shipment.
nanotools is the first and only probe manufacturer being quality certified to DIN EN ISO 9001.
Our M1 is used by leading fabs worldwide for several AFM in-line monitoring tasks such as depth control or STI.
EBD
The high aspect ratio part of the probe is made from High Density, diamond like carbon (HDC/DLC).
The tips show superior properties:
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high aspect ratio
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hydrophobic surface properties
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high stiffness / elastic modulus (8x of that of silicon)
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low thermal mass
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abrasion resistance
Our HDC dissipates static charge. This leads to probes offering the extreme durability of diamond together with high resolution imaging capability. Applying our patented EBD technique we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.