nanotools EBD-CDR family — CarbonNanoTips

• Amorphous, high-density carbon (HDC/DLC) tip
  Highly wear resistant
• T-form-like tip shape
  Constant tip radius over tip lifetime
  Constantly high resolution over tip lifetime
  High throughput during measurements
• Customizable manufacturing process
  Independently controllable tip shape dimensions
  ITRS requirements for sub-28nm nodes already fulfilled

*typical shape dimensions of a silicon-based CDR tip with a nominal tip width of 50 nm (example is not intended to be generally valid and is given without regard to any considerations pertaining to individual products)

Automated EBD wafer processing — 24/7 fabrication

• Precision + Reproducibility
  Orientation better ½°
  Nanometer accuracy in shape and dimensions
  100% tip quality check (CD-SEM)
• Durability
  Hardness 8x of silicon
  Low tip wear
  Excellent lifetime
• Availability
  Automated batch fabrication of large numbers
  >15 years supplier to semi-industry
  Quality certified per DIN ISO 9001