CDR130-EBD
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130 nm full carbon CD probe. Low vertical edge height, constant edge radius maintains resolution over tip life.
Ordercode: CDR130_NCHR_3
The nanotools CDR-EBD probes for 3D reference and hybrid metrology: with a full range of CDR-EBD probes from 130 nm down to 20 nm, this is pushing the limits of 3D-AFM technology for measuring tight dimensions and extending its capability for future nodes. It brings EBD´s key strength: precise tip orientation, precise control in tip dimensions (length, total diameter, vertical edge height, overhang) and large volume production to undercut applications. These tips do not have a wear resistance coating - but made from bulk wear resistance diamond like carbon.
Tip Spec
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| Sketch Tip Spec |
| nominal | range | |
| Material | HDC/DLC | |
| Tip vertical edge height /VEH |
10 nm | < 15 nm |
| Tip eff. length /l |
300 nm | 250-350 nm |
| Tip total width /d |
130 nm |
+/- 5 nm |
| Tip overhang /OH |
30 nm | 20-35 nm |
| Tip edge radius /r |
5 nm | < 10 nm |
| Tilt compensation /θ |
3 deg | +/- 0.5 deg |
| Pyramide height /PH |
15 µm | 10-15 µm |
| Tip set back /TSB |
15 µm | 5-25 µm |
Cantilever Spec
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| Sketch Cantilever Spec |
| nominal | range | |
| Material |
Si |
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| Shape | NT-TESPA |
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| Length /L |
125 µm | +/- 3 µm |
| Width /W |
30 µm | +/ 1 µm |
| Thickness /T |
4 µm |
3-5 µm |
| Force Const. /k |
42 N/m |
35-45 µm |
| Res. Freq. /f |
320 kHz |
300-340 kHz |
Coating
tip side: none
back side: reflex